Micro and Nanofabrication Technologies

About the track

Description

Introductory course to different microelectronic technologies and micro- and nanomanufacturing processes. It includes a demonstration and practice in the INTI Clean Room, and in the FIB/SEM, characterization and microfluidics laboratories.

Track goal

The objective of the course is to familiarize students with the work and common infrastructure of a Clean Room. In addition, the different micro manufacturing technologies most used in the manufacturing stages of ICs and MEMS devices will be addressed.

Minimum content

This theoretical-practical course plans to address micro and nanofabrication technologies:

growth and etching of thin films, sputtering, spin coating
optical lithography
FIB/SEM microscopy
characterization
packaging
sensor applications

Hands-on project

The course includes carrying out some micro- and nanofabrication processes in the INTI Clean Room and the characterization of devices.

Professors

Ing. Laura Malatto (INTI)

Graduated from UTN in Aeronautical Engineering and specialized in microelectronics.

Since 1990 she has worked at INTI in sensors and actuators applied to health, industry, agriculture and aerospace. In the beginning she worked on thick film microelectronic technologies, LTCC, and carried out the gas sensor calibration laboratory, being the first in the country to receive ENAC accreditation. Trained in leading microelectronics research institutes such as MIT, IMEC and CNM.

Since 2002 she participated in the creation of the first clean room in Argentina for R&D applications in microsystems linked to industry, which directed from its beginnings. Since that moment, projects supported by the local industry, the Ministries of Science, Industry and Health have been developed based on photolithography processes, growth and etching of thin films, packaging, among others.

She was professor of Electronic Technology for 9 years, in the Electronic Engineering Degree at UTN-FRBA.

Currently her interests are microfluidics, lab on a chip, physical sensors and biosensors, metrology chips.

Ing. Eliana Mangano (INTI, UTN-FRBA)

Graduated as an Electronics Engineer and a University Technician in Electronics from the UTN FRH. She works at INTI in the Department of Micro and Nano Fabrication. Head of the Microfluidic and Characterization and Testing Laboratories.

Ing. Luciano Agustin Patrone (INTI, UTN-FRA)

Graduated as an Electronics Engineer and a University Technician in Electronics from the UTN FRA. He works at INTI in the Department of Micro and Nano Manufacturing. Head of the FIB-SEM microscopy laboratory.

Ing. Maria Belen Kramar (INTI)

Graduated in Chemical Engineering and University Chemical Technician from UTN FRBA. She works at INTI in the Department of Micro and Nano Fabrication collaborating on R&D projects (design, microfabrication and characterization of devices).